Evaluation of Optical Interferometry for Thickness Uniformity Control of Parylene HT Coating on Titanium Substrates

This paper addresses the challenge of accurately measuring the thickness of parylene HT coatings using White Light Scanning Interferometry (WLSI), a non-destructive technique. Our results indicate a good correlation between WLSI and mechanical profilometry measurements confirming the reliability of WLSI for thickness control. Additionally, we propose a novel parylene HT etching process to compare to WLSI and mechanical profilometry measurments.