Multi Fourier Horn Ultrasonic Nebulizer Based on Laser Structuring of Silicon

Silicon (Si)-based, multiple Fourier-horn ultrasonic nebulizer (MFHUN) was fabricated through femtosecond laser cutting of Si to reduce the preparation time of samples and to study the effectiveness of this manufacturing process for producing Si-resonating nebulizers. The geometrical characterization of the structures showed tolerances in the dimensions. These tolerances affected the efficient positioning of the liquid at the tip of the horn. Furthermore, the effect of the dimensional variations on the mechanical functionality increased with minimizing the size of the resonator. By managing the flow rate of the liquid fed to the nebulizer and adjusting the frequency of the structure when in contact with the liquid, atomization occurs.