Excellent Performance and Highly Reliable a-IGZO TFTs with the Top Gate Self-Align Structure

Kinds of the top gate self-aligned a-IGZO TFTs were fabricated in order to apply in the large-size OLED display. Controlling threshold voltage drift is of great significance for ensuring device stability and reliability, optimizing power consumption and performance, extending device life, and reducing production costs. The optimized devices obtain excellent electrical performance and gate-bias stress stability, the Vth drift under various stress conditions for 7200s is less than 1V which is controlled within the circuit compensation range.