On the Integration of AlGaN/GaN HEMT and Micro-Electro-Mechanical Systems (MEMS) For Biomedical Applications: A Review

The integration of HEMTs with MEMS opens the opportunity to realize smart sensors. On chip signal processing, communication, and amplification are the merits of this integration approach. This integration can be extended to applications related to IOT and adaptive RF circuits. System on chip solutions can be designed using this integration approach of HEMT and MEMS. Both electronics and mechanical functions can be implemented on a single chip using this approach. The application of this integration can be further extended for biomedical applications and biosensors. In the present work, the electrical performance of GaN HEMT is analyzed.