Design of Temperature-Pressure Sensor Based on Slot-Antenna CSRR Integrated for Applications in High-Temperature Environments

In this study, a microwave slot-antenna loaded with complementary split ring resonator (CSRR) for wireless temperature-pressure detection in high-temperature environments was presented. To achieve the design of a miniaturized high-temperature sensor with multiple parameters, it is proposed to use an S11 to simultaneously monitor temperature and pressure parameters. Using resonant amplitude to monitor changes in environmental temperature and using resonant frequency to characterize changes in pressure, the sensitivity mechanisms for the temperature and pressure sensing are described in detail. The working principle of the temperature-pressure sensor is elaborated via circuit analysis and simulation optimization of high-frequency structure simulator (HFSS). The sensor was customized and fabricated on the high-temperature cofired ceramics (HTCC) using the 3-D co-firing and screen-printing technology. The as-prepared sensor can stably work at the ambient environment of
$20~^{\circ }$
C–
$800~^{\circ }$
C and 100–300 kPa, with a temperature sensitivity of 0.0133 dB/°C and a pressure sensitivity of 235 kHz/kPa at
$800~^{\circ }$
C. The temperature compensation algorithm is proposed to achieve accurate acquisition of pressure signals in a high-temperature environment. The sensor has the potential for utilization in simultaneous temperature and pressure monitoring in harsh environments.