Design of Virtual Simulation Experiment for Semiconductor Oxidation Process Based on Unity3D

In response to the challenges of complex teaching content, high safety risks, high economic costs, and low student interest in semiconductor process experiments, a virtual simulation experiment project for the semiconductor oxidation process was developed. This project, which is based on the Unity3D engine and virtual reality technology, uses key equipment and process flows as simulation objects. The technology has been used to design twin three-dimensional equipment models, simulation interactive components, and process mechanism algorithms. This has led to the development of a semiconductor oxidation process virtual simulation experiment system. The system offers virtual reality interactive operations, process parameter settings, experimental data access, and other functions, thereby providing a highly immersive and safe interaction environment for experimental teaching in professional courses. This effectively enhances the quality and impact of experimental teaching in these courses.