High-Temperature Ag/Pt Thick Film Thermocouple Array for Temperature Distribution Measurement

This article presents a multilayer Ag/Pt thick-film thermocouple (TFTC) array for measuring temperature distribution of hot-end components. Through liquid phase mask coating and laser etching processes, four thermocouples are meticulously arranged within a 5 mm range, featuring micrometer-scale thermocouple junctions capable of stable operation in extreme temperatures exceeding $800~^{\circ }$ C. High-temperature testing and calibration demonstrate the array’s exceptional performance in temperature sensing, showcasing remarkable consistency, accuracy, and stability. The four thermocouples exhibit consistent thermoelectric electromotive force (TEMF) ( $12.88~\pm ~0.02$ mV at $803.1~^{\circ }$ C) and excellent testing accuracy, with a maximum temperature measurement error of 0.65%FS at high temperatures. Additionally, the array exhibits remarkable resilience, maintaining stable operation even under rigorous thermal shock conditions, and can rapidly capture transient temperature distributions. This research offers promising avenues for real-time temperature monitoring in high-temperature environments.