Stability and Performance Assessment of a MIMO HIGS-based Controller Design

We present a frequency-domain stability analysis tool for the feedback interconnection of a linear time-invariant multi-input-multi-output plant and a nonlinear multi-input multi-output controller. The controller consists of several hybrid elements interconnected with well-crafted linear filters that together enable favourable phase properties and allow for improved controller performance. Stability and performance of the proposed controller design is evaluated on a wafer stage of an industrial metrology inspection machine.