An Improved Method for Electromagnetic Calculations of Dynamically Varying Cantilever Beam RF-MEMS Switches

In this paper, a numerical method based on finite difference time domain (FDTD) method is provided for analyzing electromagnetic characteristics of RF-MEMS switch with a dynamic cantilever beam in presence. The basic idea is transforming the original dynamic boundary problem to a static one via the map between two frames, one is the realistic physic frame and the other is the imaginary reference frame in which the beam is stationary. Under such a transformation, the FDTD-like time-marching scheme is formulated. The suggested method is then applied in a specific case for validation.