Advanced Nano Packaging for Silicon Nanowire Sensors

This paper describes the design of a silicon nanowire-based sensor chip and the optimization of parameters and formulas including photolithography and e-beam deposition. We present packaging issues with nanometer-thick metal deposition. The electrical response of the silicon nanowire integrated sensor array is studied using electrical current analysis. The sensors are designed to detect chemicals and biomolecules, potentially acting as novel biosensors for biomedical diagnosis in the future.