Modeling of ZnS Capacitive Pressure Sensor with a Slotted Square Membrane

Pressure sensors, including piezoresistive, piezoelectric, resonance, and capacitive sensors have been used in various applications. High pressure sensitivity, low power consumption, and higher stability are the most advantages of capacitive pressure sensors. In this paper, a slotted Zinc Sulfide (ZnS) capacitive pressure sensor (CPS) is modeled using COMSOL Multiphysics. The deflection, which affects on the operation of the membrane under pressure, is considered. Also, the capacitance is calculated for a slotted square shape. We found good performance in measuring the change in capacitance under applied pressure ranging from 0 to 18 kPa. Furthermore, a better sensitivity value of 0.011 pF/kPa with a 3 um gap value has been achieved.