Status and Deveopment of High-performance MEMS Gyroscope

In recent years, with the rapid development of micro-electromechanical systems (MEMS), the technology of MEMS gyroscope has gradually become a popular research technology in view of the gyroscope as the significant component of micro-inertial measurement system. MEMS gyroscopes can be widely used in military and civilian fields and satisfied high-demanding due to its low cost, small size, low power dissipation and batch production. This paper mainly investigates the overseas and domestic research status of MEMS gyroscopes, summarizes the characteristics and current existing problems of different types of MEMS gyroscopes, and arranges their development spectrum. By tracking the latest research results, we explore the potential research directions, analyze the development trend of MEMS gyroscopes and put forward development route in the near future, promoting and accelerating the research and applications of the MEMS inertial technology.