Research on Coupling Error Compensation Method of Macro-micro Composite Platform

The design concept of the macro-micro composite platform is to realize long travel, low accuracy and low bandwidth response through the macro platform and short travel, high accuracy and high bandwidth response through the micro platform. Due to the reaction force generated when the motor works, there will be force coupling between the macro and micro stage, which will impact on the control performance of the composite platform to a certain extent, and reduce the precision of the platform's positioning. In this paper, we propose a method to compensate the coupling error of the system using LADRC. First, the source and influence of macro-micro composite platform coupling are presented. Second, the principle derivation and control structure of the LADRC system are introduced. In the end, the simulation results validate the practicability of the proposed method.