Clear Image Acquisition by 3D High-Speed Vibration Tracking of Object With Various Shapes Under High Magnification

The automation of precision visual inspection is crucial in the manufacturing industry. In the case of observing microscopic objects, the effect of object vibration cannot be ignored. In particular, to automate visual inspection using artificial intelligence (AI), clear images are required. Thus, we have achieved to acquire clear images by a high-speed vibration tracking method with a high-speed vision system. However, the object was limited to only a black dot, and the magnification was also limited to 1 px = 20 µm. In this letter, to improve the applicability of in-line precision visual inspection, we propose a method to variegate the object and to increase the magnification of the object. Moreover, we combine the methods of variegation and high magnification. Then, we evaluate the 3D tracking performance of high-speed vibrating objects using a vibration tester. As a result, we achieve to obtain clear images of figures and alphabets at 1000 Hz or higher at a magnification of 1 px = 4 µm, proving that the system is highly practical.