Silicon-based membrane pressure sensor for inline monitoring of pressure and hermeticity of small-volume bonded packages

Hermetic Packages are of great importance for the recent miniaturization of quantum systems to secure a defined vacuum and gas species. In this work, a silicon membrane pressure sensor based on platinum strain gauge structures to measure the pressure dependent deflection of the membrane is shown. The pressure sensors are used for inline monitoring of pressure and hermeticity of small-volume bonded packages. For this purpose, the sensors are fabricated by silicon microtechnology, characterized in a developed calibration setup and finally the pressure monitoring and hermeticity test of bonded packages were carried out.