Design and Fabrication of Micro Resonator With Bilateral Concentric Boundaries

A new set of resonators is introduced in this work, which utilizes a flexible polysilicon plate symmetrically clamped at two positions across the plate's boundary. The proposed resonators provide larger deflection and hence change in capacitance with respect to the conventional fully clamped device. To demonstrate the concept, three topologies clamped at 60°, 90°, and 120° are designed and fabricated using a poly multiuser microelectromechanical systems (MEMS) process. For a fair comparison, a fully clamped conventional topology is designed and fabricated with the same dimensions and material properties. Finite element analysis along with electrical and optical characterizations are performed. The obtained measurement results demonstrate improved average deflection of 40 nm with 26% decrease in pull-in voltage.