A Multimodal Lab-On-CMOS Based Biosensor System

This paper presents the design of a multimodal sensor in CMOS integrated circuits for biosensor applications. The system consists of five sensor modalities: temperature, impedance, pH, electrochemical, and optical. The sensor electrode topology was simulated using COMSOL Multiphysics for an active electrode area of
$100\times 100\mu \mathrm{m}^{2}$
. The readout was designed in a commercial 0.18 μm CMOS technology. Monte Carlo simulation was performed on the individual modalities, considering process variations. The pH sensor sensitivity was 91 mV/pH over the 5.71 to 7.31 range. The sensitivity of the temperature sensor was 0.6 mV/°C over a 10°C to 50 °C. The electrochemical sensor has a current range of 10
$nA$
and 5 μA over the 0.2-1.2 V range for cyclic voltammetry and amperometry.