Design and Simulation of A 2.4G Wi-Fi Band BAW Filter Chip Based on Frame Structure FBARs

In this paper, a bulk acoustic wave (BAW) filter for 2.4G Wi-Fi band is designed. In order to improve the performance of the BAW filter, a high-Q film bulk acoustic wave resonator (FBAR) frame structure is designed in this paper and utilized for the layout design. The relevant parameters of the BAW filter are firstly determined by the optimized Mason model. Joint acoustic-electromagnetic simulations are carried out after designing using the parametric layout, and the simulation results are compared with those of the flat-cavity structure. The filter designed in this paper has low insertion loss (less than 3db), high out-of-band rejection (less than 48db) and small size (0.92*0.92mm
²
).