Towards Porous SI THz Planar Waveguides in Ultra-Low-Resistivity Substrates

This paper presents an innovative approach to integrate a high-quality porous silicon (PSi) waveguide on ultra-low-resistivity (ULR) substrates for terahertz (THz) applications. Eliminating the need for deep etching and multiple wafer bonding, the proposed technique leverages the low resistivity of ULR substrate and the high resistivity of PSi to create an efficient waveguide. Simulations and preliminary experiments validate the concept.