Demonstration of an Al2O3 Bidirectional Selector With an Ultralarge Selectivity of 109

In this study, a bidirectional selector fabricated using a dielectric material of AlOx is demonstrated. One single AlOx film is used as the active layer of the selector. The Al/AlOx/n+-Si selector can turn on either by a positive or negative voltage, showing a bidirectional operation feature. In addition, the selector characteristics in the positive and negative voltage regions are highly symmetric. The selectivities are both
$10^{{9}}$
. Data volatility and resistive switching (RS) behavior of the Al/AlOx/n+-Si selector are verified by investigating current-voltage characteristics under different measurement conditions. High stability of the selector is confirmed by examining read-endurance and read-disturb immunity characteristics. Turn-on/turn-off slopes, switching speed, and recovery time are also studied.