High-Q Silicon Nitride Waveguide Resonators by Nanoimprint Lithography

We demonstrate the fabrication of waveguide resonators using nanoimprint technology. Silicon nitride resonators are realized by nanoimprinting lithography (NIL) with high-quality (Q) factors up to the order of 10
⁵
. Nearly-zero waveguide dispersion can be achieved with 30 dB extinction ratios of cavity resonances.