On-Chip Monolithic Integration of QD Lasers Coupled to Foundry-Processed SiN Waveguides on 300 mm SOI Wafer

We demonstrate for the first time on-chip monolithic integration of quantum-dot (QD) lasers coupled to foundry-processed SiN waveguides on 300 mm SOI wafer with direct in-pocket MBE growth and etched-facet mirrors. This enables scalable prodcution of next-generation on-chip light sources for Si photonics.