Mean-Free-Path-Based Evaluation of Size Effect and Anomalous Skin Effect in On-Chip Interconnects Under Cryogenic Environment

This paper investigates the impact of size effect and anomalous skin effect in on-chip interconnects under cryogenic environment. Cryo-CMOS technology is required for quantum computers. At cryogenic temperature, the electron-mean-free-path becomes longer and surface scattering becomes dominant factor to determine the resistivity. Also, anomalous skin effect affects the frequency characteristics. I investigate the impact of the size effect and the anomalous skin effect by evaluating the electron-mean-free-path considering surface scattering. Numerical evaluation reveals that size-dependency of the resistivity and the anomalous skin effect have to be taken into consideration.