Observation of Nonlinearity Induced by Transverse Modes in SAW Devices Based on 36°YX-LiTaO3/SiO2/SiC Structure

Featuring a prominent performance upgrade, the surface acoustic wave (SAW) device on the multilayer substrate stands out as a strong competitor in fifth-generation (5G) applications. In this paper, harmonics generation in SAW resonators on a 36° YX-LiTaO
3
/SiO
2
/SiC substrate is studied experimentally. Comparative analysis with conventional SAW resonators on a bulk substrate reveals that the layered structure exhibits pronounced harmonic responses induced by transverse modes, which stand as a crucial constraint to its nonlinear performance.