Demonstration of 8-Inch Thin-Film $\text{Sc}_{0.3}\mathrm{A}1_{0.7}\mathrm{N}$ BAW Resonator with High Electromechanical Coupling Coefficient

In this study, we introduce the development of high-quality
$\mathbf{Sc}_{0.3}\mathbf{Al}_{0.7}\mathrm{N}$
thin films (≤500 nm) for BAW resonators operating at 4 GHz and 6 GHz. Our findings reveal a substantial enhancement in the material coupling coefficient, exceeding 23%. This advancement enhances the potential of BAW technology in meeting the requirements of emerging wireless communication standards, particularly in terms of bandwidth.