Influence of the Tilted IDT on Nonlinear Harmonic Signals in SAW Resonators on LiNbO3/SiO2/Si Structure

This paper investigates the nonlinear behavior of SAW resonators on 30
^∘
YX-LiNbO
3
/SiO
2
/Si layered structure. The influence of the tilted IDT on the nonlinear harmonic signals generation in the SAW resonator is studied. The one-port resonators with different IDT electrodes tilted from 0° to 16° are fabricated. And the second-order harmonic and third-order nonlinear harmonic response of these resonators were measured and analyzed. Compared to the parallel electrodes case, the nonlinear harmonic level decreases by 10dBm with the tilted electrode. Meanwhile, the transverse mode of the resonator is effectively suppressed. It is concluded that the tilted electrodes technique is conducive to suppressing of the transverse mode and nonlinearity, simultaneously.