High Q-Factor Low Band SAW Filter Based on High Performance POI Substrate

Piezoelectric-on-Insulator wafers based on the combination of single-crystal piezoelectric, oxide and Silicon represent a unique solution to address 5G and next generation 6G surface acoustic wave filter challenges. This paper is particularly discussing the use of POI for sub-GHz applications. The stack is adapted to provide optimal SAW properties required to meet the corresponding signal processing specifications. Figures of Merit are reported for different configurations, demonstrating the performance of the approach and the actual capability of SAW-on-POI to provide high quality filters for frequency bands ranging from 500 MHz to 1.0 GHz.