Cathodoluminescence Characterization of Diamond Polished by Gas Cluster Ion Beam

Cathodoluminescence was used to characterize crystal defects in natural diamond before and after gas cluster ion beam (GCIB) irradiation. Results show that severe damages existed beneath the scaife polished diamond surface. Although the natural diamond after ArSF
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-GCIB irradiation may include fewer damages, the surface quality became more uniform.