Ultra-Small Size Micro-LEDs With Enhanced Efficiency for Near-Eye Display

Micro Light-emitting diodes (Micro-LEDs) array for near-eye display with pixel dimensions of ${1}.{3}\times {1}.{5}~\mu $ m2 were fabricated, corresponding to a resolution of 10040 pixels per inch (PPI). Optimized N2O plasma treatment process was deployed to minimize the sidewall non-radiative recombination and increase radiative efficiency of Micro-LEDs. The experimental results demonstrated a significant improvement in external quantum efficiency (EQE) of blue and green Micro-LEDs, with peak EQE of 22.3% and 19.3%, respectively. High brightness and optical power density was acquired exceeding ${5}\times {10} ^{{7}}$ nits and ${7}\times {10} ^{{4}}$ mW/cm2. And excellent wavelength and efficiency stability were demonstrated with respect to the temperature. This results illustrate an immense potential of Micro-LEDs for high resolution near-eye display applications.