Design and Experiment of a Micro Planar Linear Motor Equipped with Electromagnetic Guide

In this paper, the design and experiment of a planar linear motor equipped with an integrated electromagnetic guide is proposed. The motor consists of a stator and a mover. The stator has a novel design which integrates a driving coil with a guide micro coil into one chip. The mover has a line/space permanent magnet structure. The working principle of the motor, the motor configuration and the electromagnetic force performance is analyzed. The motor prototype is fabricated by micro micromachining process. The motor is experimentally evaluated, the slider attained a maximum velocity of 50mm/s with stable attachable performance. Furthermore, the electromagnetic guide enables adjustable stiffness as well as enlarge the mover bandwidth.