Effect of Green Corrosion Inhibitors on the Performance of Copper-Cobalt CMP

In cobalt-based copper interconnected copper film chemical mechanical polishing (CMP), corrosion inhibitors have an important influence on the surface quality after polishing. The effects of hypoxanthine and sarcosine as corrosion inhibitors on the performance of copper-cobalt CMP were investigated. The results showed that a strong step height correction capability and a high selectivity ratio of copper and cobalt removal rate were obtained and practiced the concept of green environmental protection.