Producer-GT ™ High Productivity CCP ETCH Solution

Producer-GT ™ is designed for dielectric capacitively coupled plasma (CCP) etch applications with great throughput. It offers not only the productivity advantages of dual wafer handling and processing, but also cost effectiveness of parts simplification and corrosion resistance. The Producer-GT ™ etch system can support up to six wafer processing environments, two per twin chamber, achieving high productivity etch process.