Performance Evaluation of a MEMS-Compatible Flexible Graphene Bolometer for Chamberless NDIR Gas Sensing

We demonstrate a MEMS-compatible detector with a single channel that employs chemical vapor-deposited graphene (G
_CVD
) in a chamberless, nondispersive infrared gas sensing configuration. The detector, designed to function as a thermistor bolometer, is intricately crafted by integrating serpentine-shaped G
_CVD
into flexible, epoxy-based SU-8 photopolymer, covering an area of 500 × 500
µ
m
²
. Experimental evaluations of the detector were carried out at a distance of 30 mm away from the light source within a chamberless setup to assess its performance metrics. The results unveil a peak responsivity of approximately 0.65 V/W for the G
_CVD
-based detector. This outcome underscores the simplicity of the fabrication process, eliminating the necessity for implementing intricate structures like p-n junctions, surface plasmons, or microcavities. Moreover, the detector demonstrates rapid resistance switching, with an impressive response time of 1.2 s and a recovery time of 1.7 s observed during the electrical chopping of the light source.