An Approach to Neutron-Induced SER Evaluation Using a Clinical 290 MeV/ u Carbon Beam and Particle Transport Simulations

We propose a method of soft-error tolerance evaluation for terrestrial applications using a clinical carbon beam facility. Carbon ions are irradiated onto an acrylic block to form the Bragg peaks within the acrylic block. Test chips were irradiated with neutrons from the acrylic block. Charged particles with high LET such as alpha particles are shielded by Pb block. In this study, we compared the results of the proposed method with those of white neutron irradiation using flip-flops in a 65 nm bulk process. The results of the comparison showed that the correlation coefficient is over 0.9, and the differences in their SERs were within approximately 25%. Clinical carbon beam facilities can be use as alternatives for SER evaluation.