A Comprehensive Hot Carrier Injection with Voltage Ramp Stress (HCI-VRS) through Different Model Verification for More than Moore Diversity Application

HCI-CVS is an accepted way for process qualification in worldwide industries. However, the efficiency of reliability testing is important to more than Moore diversity application such as 3DIC, NVM, HV/BCD, CIS, etc. This paper integrates the commonly used reliability models in the industry. Through VRS and silicon verification, the comparable results to CVS can be obtained. And a novel VRS-analyzer for process limits and accelerated testing voltage is proposed, which can also be used to assess the health of dynamic voltage stress (DVS) voltage. This method can improve evaluation speed and reduce stress energy by about >10X.