Low-loss, multi-reticle stitched SiN waveguides for 300mm wafer-level optical interconnects

We present 56-cm long LPCVD SiN waveguides traversing a full 300mm wafer, targeting future optically interconnected wafer-scale multi-chip compute systems. High-precision reticle stitching (loss below 0.01dB/interface) enables intra-wafer waveguide loss of just 0.15dB/cm in the O-band.