3D Freeform Millimeter-Wave and THz Structures Based on Multi-Photon Lithography

We exploit high-resolution multi-photon lithography for fabricating 3D-freeform millimeter-wave and THz structures that overcome the limitations of conventional planar architectures. We demonstrate THz probes, suspended antennas, and ultra-broadband chip-chip interconnects offering bandwidths in excess of 0.3 THz.