Mitigating substrate leakage loss on a monolithic SiPh platform: experimental demonstration of hybrid Si-SiN waveguides for O-band datacom

We introduce the concept of hybrid Si-SiN waveguides to mitigate substrate leakage on a monolithic-SiPh platform. Experimental data indicates an ~80% reduction in TM-waveguide loss (resulting in ~0.3 dB/cm-attenuation) and a 9-fold TM-bend loss reduction.