Low-loss and Thermal-stable Ta2O5 Photonic Platform with Low-temperature Process

We demonstrate a Ta
2
O
5
photonic platform with a propagation loss of 0.5dB/cm and a thermo-optic coefficient of 2.3×10
^-6
/K at 1550 nm. The process temperature is below 350℃, friendly to integration with other optoelectronic components.