0.08 fF, 0.72 nA dark current, 91% Quantum Efficiency, 38 Gb/s Nano-photodetector on a 45 nm CMOS Silicon-Photonic Platform

We demonstrated a Germanium-on-Silicon photodetector utilizing an asymmetric-Fabry-Perot resonator with 0.08 fF capacitance. The measurements at 1315.5 nm show 0.72 nA (3.40 nA) dark current, 0.93 A/W (0.96 A/W) responsivity, 36 Gb/s (38 Gb/s) operation at -1V (-2V) bias.