Broadband, Efficient, and Low Dark Current SiN-on-SOI Waveguide-Coupled Photodetectors for Visible Light

We demonstrate foundry-fabricated waveguide-coupled photodetectors wherein silicon nitride waveguides pass overtop doped silicon-on-insulator patches. At a 5V reverse bias, dark currents < 8pA, and red, green, and blue-wavelength external quantum efficiencies >70% were measured.