Design and Analysis of a Low-g MEMS Accelerometer Utilizing Weakly Coupled Resonators

The primary focus of this paper is to design a mode-localized MEMS accelerometer that incorporates weakly coupled resonators of 2-DoF. This accelerometer's proof-mass is designed to form an electrostatic coupling with the inner resonator of the 2-DoF weakly coupled resonators. The acceleration sensed by this device is measured by using the ratios between the amplitudes of vibrations in both resonators. A comprehensive analysis is performed which incorporates both simulations based on FEM (finite element method) and analytical calculations. This approach allows for a thorough understanding of the device's behavior and characteristics. The limitations and constraints of the widely available microfabrication technique, SOIMUMPS (silicon-on-insulator multi-user MEMS processes) are also considered while designing this accelerometer. Overall, this paper presents a comprehensive overview of the design process, performance analysis, and fabrication readiness of the 2-DoF mode-localization-based MEMS accelerometer. The sensitivity reported for this accelerometer is 6.94/g, considering the ratio of the vibrational amplitudes as the output metric. The findings demonstrate the potential of this design to meet the stringent requirements of various applications, particularly those requiring precise motion-sensing capabilities.