TFT Array: Inspection, Testing, and Repair

Summary

Implementation of various inspection, metrology, testing, repair, and software analysis tools along the entire production line allows flat panel display (FPD) manufacturers to manage and increase their yields. This chapter discusses the main types of production defects that are common to all technologies, FPD device types and processes, and also the detection and repair of these defects. In FPD manufacturing, defects caused by the production process, equipment, or particles can lead to malfunctioning of the thin‐film transistor (TFT) circuits and yield loss. The defects detected by the array tester system can usually be classified into electrical and non‐electrical types, with most of the critical defects being classified as electrical defects. The Automated Optical Inspection (AOI) system is used to either reduce the statistical occurrence of defects; or for supporting repair activity on a specific display panel, which might otherwise be rendered "scrap".