2-DOF Mems Mirror with Large Mechanical Angles Using One Magnetic Field for Close Range Scanning Applications

This paper presents for the first time a micro-size MEMS mirror design that achieves large rotational mechanical angles of two axes using single electromagnetic field. The mirror features special packaging method that corrects the coupling effect between the axes, resulting in highly stable mechanical angle response. Additionally, the mirror includes honeycomb structures on the backside that distribute weight uniformly, improving stability. At resonant mode, The MEMS mirror reaches rotational mechanical angles of 10 degrees in the fast axis and 20 degrees in the slow axis with the current of mA order, which allows this mirror working for close-range scanning applications, such as dental ablation. The design, simulation, and fabrication processes are described, and the experimental results demonstrate this MEMS mirror has the largest mechanical angles which is currently not commercially available.