Operation of Arrayed Logic Elements for Mems Ising Machine

Micro electromechanical systems (MEMS)-based Ising machines have been proposed for non-von-Neumann computers, which awaits to be realized. This paper reports on the MEMS logic elements for the Ising machine, which was for the first time made into array and demonstrated. A buckled beam produces double-well potential that corresponds to |0> and |1>. The elements are connected by comb capacitive actuators and move between the two states, interfering with each other. A robust and flexible structure was designed, which realized the state transition by element-to-element interference.