A Fully Packaged Microfluidic Thermal Biosensor Designed Based On Mems Technology and Its Enzyme Immobilization

To reduce heat loss and improve detection sensitivity, a microfluidic thermal biosensor with a suspending microchannel based on MEMS technology is proposed. Conventional ways to immobilize enzyme into microfluidic sensors require complicated process which may introduce pollution. Microbeads integrated with enzymes via Carbodiimide are utilized to realize bio-functionalization of packaged biosensors. The proposed biosensor obtains a highly linear sensitivity 0.37V/W and correlation coefficient of output-input is about 1. System response time is within 200ms. Also, the heat from enzymatic reaction is sensitively captured in a 12.5nL chamber. Our biosensor is expected to realize biorecognition with highly sensitive for healthcare application.