Characterization of Piezoelectric Micromachined Ultrasonic Transducers for Biomedical Applications

We report a study of AlN-based piezoelectric micromachined ultrasonic transducers (PMUT) dedicated to biomedical applications. The fabrication, the packaging, the electrical and acoustical characterization of the devices are reported and compared with the expectations. The device exhibits a 35% -3dB bandwidth with a central frequency at 10.4 MHz. The drive sensitivity is measured at 0.63 kPa/V/mm
²
and the receive sensitivity at 570 μA/MPa/mm
²
. This confirms the potential of PMUT as low-voltage, miniaturized ultrasound transducers for biomedical applications.