Cross-Sectional Shape Control of Microchannel on Micropowder Blasting with Nozzle Tilting Angle

A microchannel with a rectangular cross-section was realized on a glass by micropowder blasting with a nozzle tilting angle control for the first time. The effect of the nozzle tilting angle on the processed microchannel cross-section was clarified using glass with 200 μm width mask-pattern. From the experimental results, the nozzle tilting angle at 25 degrees resulted in a vertical sidewall was found. The rectangular cross-sectional microchannel was realized on the glass by two steps process with changing the nozzle tilting angle of −25 at 30 passes and 25 degrees at 30 passes every five passes.