MEMS-Based Broad Band Micro Vibration Energy Harvesters Utilizing (Mghf)0.1Al0.9N

This paper exhibits the novel 10 atm.% MgHf-co-doped AlN ((MgHf)
0.1
Al
0.9
N) piezoelectric films based broad band micro vibration energy harvesters (VEHs). Our energy harvester consists of a hybrid Si/W proof-mass suspended on 4 beams forming a hard-spring-based nonlinear structure. (MgHf)
0.1
Al
0.9
N films offered high power figure of merit (FOM) of 27.4 GPa. As the results, a significant improvement in performance of micro-energy harvesters has been achieved. The bandwidth of power spectra increases 14 times compared to that of conventional cantilevers-based devices. On the other hand, the normalize power density (NPD) increases 19-fold of the best published AlN-based devices. The result showing in this paper paved the way for the utilizing (MgHf)AlN-based VEHs as a power source in the coming wireless sensor networks.