A Fast Characterization Method for Pressure Sensors with Continuously Ramping Pressure and Temperature

This paper reports on a novel characterization method for pressure sensors with continuously ramping pressure and temperature. A micro-electro-mechanical systems (MEMS) pressure sensor was employed to demonstrate the effectiveness of the novel characterization method. Experimental results indicated that this reduced the characterization time by 2.4 times and increased the number of data samples by 42.0 times compared to a conventional test method. The mismatches between the new and conventional methods were 0.0614 % full scale (FS, 1.7 bar), 0.0614 % FS, 0.0025 % FS and 0.0037 % FS in terms of device under test (DUT) sensitivity @ 20°C, offset @ 20°C, temperature coefficient of sensitivity (TCS) and offset (TCO), respectively. Besides, this characterization method can be extended to other sensors requiring stabilization of more than two environmental parameters.